INVESTIGATIONS OF THIN TITANIUM OXIDE FILMS GROWN BY REACTIVE PULSED LASER DEPOSITION

Dorcioman Gabriela, Fufa Oana, Craciun Valentin, Miroiu Marimona, Garoi Petronela, Axente Emanuel, Sima Felix, Craciun Doina,

ABSTRACT

Titanium oxide thin films were deposited on Si monocrystalline substrate using the pulsed laser ablation technique in a reactive oxygen atmosphere. The films were obtained starting from Ti and TiO2 targets which were ablated using a KrF* excimer laser (λ = 248 nm). During the deposition, the Si substrates were heated at 300 °C under various high purity oxygen atmosphere of 1.0, 0.5 and 0.1 mbar. Grazing incidence X-ray diffraction investigations revealed the presence of a nanostructured film consisting of a mixture of several titanium oxides, with crystalline grains size of few nm to 10 nm. Only the film deposited from the Ti target at a pressure of 1.0 mbar exhibited crystalline grains of 30-40 nm. Thin films surface morphology and topography, studied using atomic force and scanning electron microscopy, revealed a relatively smooth surface with the presence of some submicron droplets, typical for laser ablation technique. Films deposited at 0.5 mbar pressure from both targets were significantly rougher than the other deposited films

Download (PDF, 991KB)

citeste tot articolul

By continuing to use the site, you agree to the use of cookies || Prin continuarea navigarii pe acest site esti de acord cu utilizarea cookie-urilor more information || mai multe informatii

RJOR.RO utilizeaza fisiere de tip cookie pentru a personaliza si imbunatati experienta ta pe Website-ul nostru. Te informam ca ne-am actualizat politicile pentru a integra in acestea si in activitatea curenta a adre.ro cele mai recente modificari propuse de Regulamentul (UE) 2016/679 privind protectia persoanelor fizice in ceea ce priveste prelucrarea datelor cu caracter personal si privind libera circulatie a acestor date. inainte de a continua navigarea pe Website-ul nostru te rugam sa aloci timpul necesar pentru a citi si intelege continutul Politicii de Cookie. Prin continuarea navigarii pe Website-ul nostru confirmi acceptarea utilizarii fisierelor de tip cookie conform Politicii de Cookie. Nu uita totusi ca poti modifica in orice moment setarile acestor fisiere cookie urmand instructiunile din Politica de Cookie The cookie settings on this website are set to "allow cookies" to give you the best browsing experience possible. If you continue to use this website without changing your cookie settings or you click "Accept" below then you are consenting to this.

Close